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普通MOS 和COOL MOS比较

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    2022-2-7 15:16
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    发表于 2019-11-26 08:58 | 只看该作者 回帖奖励 |倒序浏览 |阅读模式

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    本帖最后由 CE_Manager 于 2019-11-26 08:58 编辑
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    关键词:普通MOS  COOLMOS
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    COOLMOS与VDMOS的结构差异
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    为了克服传统MOS导通电阻与击穿电压之间的矛盾,一些人在VDMOS基础上提出了一种新型的理想器件结构,称为超结器件或COOLMOS,COOLMOS的结构如图2所示,其由一些列的P型和N型半导体薄层交替排列组成。在截止态时,由于P型和N型层中的耗尽区电场产生相互补偿效应,使P型和N型层的掺杂浓度可以做的很高而不会引起器件击穿电压的下降。导通时,这种高浓度的掺杂可以使其导通电阻显著下降,大约有两个数量级。因为这种特殊的结构,使得COOLMOS的性能优于传统的VDMOS.
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http://data:image/png;base64,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    对于常规VDMOS器件结构,Rdson与BV这一对矛盾关系,要想提高BV,都是从减小EPI参杂浓度着手,但是外延层又是正向电流流通的通道,EPI参杂浓度减小了,电阻必然变大,Rdson就大了。Rdson直接决定着MOSFET单体的损耗大小。所以对于普通VDMOS,两者矛盾不可调和,这就是常规VDMOS的局限性。   但是对于COOLMOS,这个矛盾就不那么明显了。通过设置一个深入EPI的的P区,大大提高了BV,同时对Rdson上不产生影响。对于常规VDMOS,反向耐压,主要靠的是N型EPI与body区界面的PN结,对于一个PN结,耐压时主要靠的是耗尽区承受,耗尽区内的电场大小、耗尽区扩展的宽度的面积。常规VDSMO,P body浓度要大于NEPI,大家也应该清楚,PN结耗尽区主要向低参杂一侧扩散,所以此结构下,P body区域一侧,耗尽区扩展很小,基本对承压没有多大贡献,承压主要是P body--N EPI在N型的一侧区域,这个区域的电场强度是逐渐变化的,越是靠近PN结面,电场强度E越大。对于COOLMOS结构,由于设置了相对P body浓度低一些的P region区域,所以P区一侧的耗尽区会大大扩展,并且这个区域深入EPI中,造成了PN结两侧都能承受大的电压,换句话说,就是把峰值电场Ec由靠近器件表面,向器件内部深入的区域移动了。

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